Instrumentation List
- Atomic Force Microscope - Bruker Dimension Icon
- Focused Ion Beam - Scanning Electron Microscope - FEI Helios NanoLab G3 CX with Quorum PP3010T Cryo-SEM System
- Scanning Electron Microscope - Zeiss Merlin with Gemini II Column
- Transmission Electron Microscope - FEI Tecnai G2 Osiris S/TEM
- Assorted optical microscopes - for inspection and digital imaging
- Advanced Imaging PC - for Image Stack Processing
- Confocal Raman Microscope - Thermo Scientific DXR
- Contact Angle Goniometer - Ossila L2004A1
- Four Point Probe - Ossila T2001A
- Fourier Transform Infrared Spectroscopy with photoelastic modulator - Bruker Tensor 27
- NanoSight - Malvern Panalytical Nanosight NS300
- Probe Station - Micromanipulator 450PM, Keithley 4200A-SCS
- Quartz Crystal Microbalance w/Dissipation Monitoring - Biolin Scientific Qsense E4
- Solar Testing - Oriel Instruments 100W Xenon Lamp with AM 1.5G filter, Cornerstone 130
Monochromater, Keithley 2400 SMU - Spectrofluorometer - Jobin Yvon Fluorolog-3 FL3-111
- Spectrophotometer - Agilent Technologies Cary 5000 UV-VIS-NIR
- Spectroscopic Ellipsometer - JA Woollam M-2000VI
- Stylus Profilometer - Bruker Dektak 150
- Stylus Profilometer - KLA Tencor P-7
- Thermogravimetric Analyzer - Instrument Specialists TGA-1000
- Zetasizer - Malvern Panalytical Advance Series Ultra (Red Label)
- Atomic Layer Deposition - PicoSun R-200 Advanced
- Electroplating System
- Plasma Enhanced Chemical Vapor Deposition - Trion Orion II
- Multimode Deposition Chamber - Angstrom Amod - Combined E-beam, Resistive & Sputter
Deposition Chamber - Parylene Coater - SCS Labcoter 3
- Resistive Evaporator - Angstrom Amod - Resistive Chamber
- Sputter Deposition - AJA ATC-2200
- Sputter Coater - Cressington 108
- Tube Furnace - Lindberg Blue M (1")
- Tube Furnace - MTI OTF-1200X (4")
- Deep Reactive Ion Etch - Oxford PlasmaPro 100 Cobra ICP-RIE
- Microwave Plasma Asher - PVA TePla IoN Wave 10
- Reactive Ion Etch Chlorine - Trion Minilock II RIE
- Reactive Ion Etch Fluorine - Trion Phantom II ICP-RIE
- Plasma Cleaner - Fischione Model 1020
- Plasma Cleaner - Harrick Plasma PDC-32G
- Porous Silicon Etching System - AMMT MPSB 100
- XeF2 Vapor Etch - SPTS Xactix e2
- Electron Beam Lithography System - Elionix ELS-BODEN
- Laser Writer - Heidelberg Instruments 渭PG 101
- Layout Editor Software - Tanner L-Edit
- Mask Aligner - Karl Suss MA-6
- Photoplotter - Bungard Filmstar-PLUS Small
- Assorted spin coaters and hot plates
- Cleanroom Glovebox - Inert PureLab HE connected to Angstrom deposition chambers
- Grinder/Polisher - Buehler Ecomet 30
- HMDS Oven - Yield Engineering Systems 310TA
- Microfluidic Flow Control System - Fluigent LineUp Series
- Nitrogen Glovebox - Mbraun Unilab Workstation
- Process Hoods - Acid/Base, Develop, EBL, HF, Liftoff, Microfluidics (SU-8), Photoresist, RCA Clean
- Rapid Thermal Processor - SSI Solaris 150
- Schlenk Line - Dual Manifold Vacuum/Argon Line
- Standard Oven - Thermo Scientific Heratherm OGS60
- Standard Oven - Yamato Drying Oven DX 300
- Tube Furnace - Lindberg Blue M (1")
- Tube Furnace - MTI OTF-1200X (4")
- UV Ozone Cleaner - Jelight M42
- Vacuum Oven - Thermo Scientific Lindberg Blue M
- Dicing Saw - DISCO DAD3220
- Wire Bonder - Westbond 7476D Wedge
- NanoAssemblr - Precision NanoAssemblr Benchtop
- PDMS Aligner - ThorLabs motion control, DinoLite Optics
- Screen Printer - MTI EQ-SPC-2-LD
- Wax Printer - Xerox ColorQube 8570
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