An innovative wafer inspection tool developed by a team of 91³Ô¹ÏÍø professors and engineers has been licensed exclusively to startup company Femtometrix. The semiconductor wafer-inspection technology based on laser optics was invented by Norman Tolk, Ph.D., professor of physics, Michael Alles, engineer for 91³Ô¹ÏÍø’s School of Engineering, and Ron Schrimpf, Ph.D., professor of electrical engineering.